Philadelphia, PA, — Motion Control Components and Systems – Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.
Parameters
Unit
XY-OF-UL-200×200+
ACR160UT
XY-OF-UL-280×280+
ACR260UT
XY-OF-UL-350×350+
ACR335UT
XY table
XY-OF-UL-200×200
XY-OF-UL-280×280
XY-OF-UL-350×350
Rotary table
ACR-160UT
ACR-260UT
ACR-335UT
Motor type
brushless servo motor /encoder (standard)
linear servo motor (option)
XY stroke
mm x mm
200 x 200
–
280 x 280
–
350 x 350
–
Angular rotation
deg
– 360
-360
-360
Center aperture
dia
mm
160
260
335
Resolution (linear)
µ
1 (note 1,2)
2.5 (note 3)
–
1 (note 1,2)
2.5 (note 3)
–
1 (note 1,2)
2.5 (note 3)
–
Resolution (rotary)
arc-
sec
-1.4
-1
-0.9
Repeatability (linear)
µ
5 (note 3)
1 (notes 1,2)
Repeatability (rotary)
arc-
sec
2
Speed
mm/
sec
400 (note 3)
800 (note 2)
Load weight
kg
30
Stage weight
kg
16
22
28
(note 1) with linear encoder (option)
(note 2) with linear servo motor (option)
(note 3) ball screw 10 mm lead, brushless servo driven
For additional information on unit XY-OF-UL-200×200+ACR160UT CLICK HERE!
For additional information on unit XY-OF-UL-280×280+ACR260UT CLICK HERE!
For additional information on unit XY-OF-UL-350×350+ACR335UT CLICK HERE!
About IntelLiDrives —
IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.
For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at sales@intellidrives.com.com or go Intellidrive – Contact Us at: www.intellidrives.com/contact-us
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